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Depth profiling of carbon and nitrogen in copper using nuclear reactions

Thomé, T, Colaux, JL and Terwagne, G (2006) Depth profiling of carbon and nitrogen in copper using nuclear reactions Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 249 (1-2 SP). pp. 377-380.

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Abstract

Simultaneous implantations of C and N were performed into copper using the non-deviated beam line of a 2 MV Tandetron accelerator. The atomic composition of the implanted layer was measured using appropriate nuclear reactions with a 1.05 MeV deuteron beam. C(d, p)C and N(d, α)C nuclear reactions were used to depth profile simultaneously C and N and to determine the relative contribution of multi-ionised C and N ions to the carbon and nitrogen distribution. We also used the narrow resonance at 429 keV of the N(p, αγ)C nuclear reaction to check the validity of our results. The depth distributions obtained with this resonant nuclear reaction confirmed that (d, p) and (d, α) reactions are well suited to profile both carbon and nitrogen elements with a quite good resolution. Moreover, using these reactions makes possible to profile C and N atoms with a single and relatively rapid measurement. © 2006 Elsevier B.V. All rights reserved.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre
Authors :
AuthorsEmailORCID
Thomé, TUNSPECIFIEDUNSPECIFIED
Colaux, JLUNSPECIFIEDUNSPECIFIED
Terwagne, GUNSPECIFIEDUNSPECIFIED
Date : August 2006
Identification Number : 10.1016/j.nimb.2006.04.033
Additional Information : NOTICE: this is the author’s version of a work that was accepted for publication in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 249(1-2), August 2006, DOI 10.1016/j.nimb.2006.04.033.
Depositing User : Symplectic Elements
Date Deposited : 20 Mar 2013 14:45
Last Modified : 25 Dec 2014 14:33
URI: http://epubs.surrey.ac.uk/id/eprint/745712

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