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Electron paramagnetic resonance and photoluminescence study of Er-impurity complexes in Si

Carey, JD, Barklie, RC, Donegan, JF, Priolo, F, Franzo, G and Coffa, S (1999) Electron paramagnetic resonance and photoluminescence study of Er-impurity complexes in Si PHYSICAL REVIEW B, 59 (4). pp. 2773-2782.

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Electron paramagnetic resonance (EPR) and photoluminescence (PL) spectroscopy have been used to examine the structure and optical properties of erbium-impurity complexes formed in float-zone Si by multiple-energy implants at 77 K of Er together with either O or F. After implantation a 2-μm-thick amorphous layer was formed containing an almost uniform concentration of Er (1019/cm3)and O (3×1019/cm3 or 1020/cm3) or F (1020/cm3). Samples were annealed in nitrogen at 450 °C for 30 min (treatment A), treatment A+620 °C for 3 h (treatment B), treatment B+900 °C for 30 s (treatment C) or treatment B+900 °C for 30 min (treatment D). Samples coimplanted to have 3×1019O/cm3 and subject to treatment C show a broad line anisotropic EPR spectrum. These samples have the most intense low-temperature PL spectrum containing several sharp peaks attributed to Er3+ in sites with predominantly cubic Td symmetry. Increasing the O concentration to 1020/cm3 produces sharp line EPR spectra the strongest of which are attributed to two Er3+ centers having monoclinic C1h and trigonal symmetry. The principal g values and tilt angle for the monoclinic centers are g1=0.80, g2=5.45, g3=12.60, τ=57.3°, g∥=0.69, and g⊥=3.24 for the trigonal centers. The low-temperature PL spectrum from this sample showed additional sharp lines but the total intensity is reduced when compared to the sample with 3×1019O/cm3. For the sample containing 1020O/cm3 at least four distinct centers are observed by EPR after treatment B but after treatment D no EPR spectrum is observed. The PL spectra are also observed to change depending on the specific anneal treatment but even after treatment D, Er-related PL is still observed. Samples containing 1020F/cm3 and annealed with either treatment B or C produced an EPR spectrum attributed to Er3+in a site of monoclinic C1h symmetry with g1=1.36, g2=9.65, g3=7.91, and τ=79.1°.Tentative models for the structures of Er-impurity complexes are presented and the relationship between the EPR-active and PL-active centers is discussed.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :
Date : 15 January 1999
Identification Number : 10.1103/PhysRevB.59.2773
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Condensed Matter, Physics, MOLECULAR-BEAM EPITAXY, 1.54 MU-M, CRYSTALLINE SI, DOPED SILICON, ERBIUM, ELECTROLUMINESCENCE, LUMINESCENCE, DIODES, DEFECTS, OXYGEN, C1h symmetry, C3v symmetry, D3d symmetry, C3i symmetry, EPR angular dependance, ESR angular dependance, (110) plane of rotation, Euler angles, irreducible representations, magnetic resonance rare earth ions, rare earth quantum computing, quantum materials, quantum technologies, spins, Materials physics
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Additional Information : Copyright 1999 The American Physical Society. This is the author's accepted version.
Depositing User : Symplectic Elements
Date Deposited : 28 Jan 2013 12:10
Last Modified : 09 Jun 2014 13:13

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