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The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography

Mills, CA, Fernandez, JG, Errachid, A and Samitier, J (2008) The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography MICROELECTRONIC ENGINEERING, 85 (9). 1897 - 1901. ISSN 0167-9317

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Item Type: Article
Additional Information: NOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 85(9), September 2008, DOI 10.1016/j.mee.2008.06.014.
Uncontrolled Keywords: Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, NANOSCIENCE & NANOTECHNOLOGY, OPTICS, PHYSICS, APPLIED, polymer engineering, embossing, nanoimprint lithography, BIOMEDICAL APPLICATIONS
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Depositing User: Symplectic Elements
Date Deposited: 26 Nov 2012 10:50
Last Modified: 09 Jun 2014 13:14
URI: http://epubs.surrey.ac.uk/id/eprint/736488

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