The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography
Mills, CA, Fernandez, JG, Errachid, A and Samitier, J (2008) The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography MICROELECTRONIC ENGINEERING, 85 (9). pp. 1897-1901.
Mills uelec eng 85 08 1897.pdf
Available under License : See the attached licence file.
|Date :||1 September 2008|
|Identification Number :||https://doi.org/10.1016/j.mee.2008.06.014|
|Uncontrolled Keywords :||Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, NANOSCIENCE & NANOTECHNOLOGY, OPTICS, PHYSICS, APPLIED, polymer engineering, embossing, nanoimprint lithography, BIOMEDICAL APPLICATIONS|
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|Additional Information :||NOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 85(9), September 2008, DOI 10.1016/j.mee.2008.06.014.|
|Depositing User :||Symplectic Elements|
|Date Deposited :||26 Nov 2012 10:50|
|Last Modified :||17 Jan 2015 14:43|
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