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The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography

Mills, CA, Fernandez, JG, Errachid, A and Samitier, J (2008) The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography MICROELECTRONIC ENGINEERING, 85 (9). 1897 - 1901. ISSN 0167-9317

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Abstract

Polymers with high glass transition temperatures, fluorinated ethylene propylene copolymer (FEP) and poly(ethylene naphthalate) (PEN), have been used in imprint lithography as a protective support layer and as a secondary mould, to imprint superficial structures into a polymer with a lower glass transition temperature, namely poly(methyl methacrylate) (PMMA). As a support layer, FEP replaces fragile silicon based supports for the production of freestanding, structured sheets of PMMA, useful, for example, in biomedical applications where transmittance optical microscopy is required. Secondary PEN moulds, produced by imprinting using silicon-based primary moulds, have been used to transfer sub-micrometer tall structures to a freestanding PMMA sheet. Similarly, hole structures, with different dimensions, have been embossed in both sides of a PMMA sheet simultaneously.

Item Type: Article
Additional Information: NOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 85(9), September 2008, DOI 10.1016/j.mee.2008.06.014.
Uncontrolled Keywords: Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, polymer engineering, embossing, nanoimprint lithography, BIOMEDICAL APPLICATIONS
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Depositing User: Symplectic Elements
Date Deposited: 26 Nov 2012 10:50
Last Modified: 23 Sep 2013 19:51
URI: http://epubs.surrey.ac.uk/id/eprint/736488

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