Electronic state modification in laser deposited amorphous carbon films by the inclusion of nitrogen
Miyajima, Y, Adamopoulos, G, Henley, SJ, Stolojan, V, Tison, Y, Garcia-Caurel, E, Drevillon, B, Shannon, JM and Silva, SRP (2008) Electronic state modification in laser deposited amorphous carbon films by the inclusion of nitrogen JOURNAL OF APPLIED PHYSICS, 104 (6). ? - ?. ISSN 0021-8979
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Official URL: http://dx.doi.org/10.1063/1.2977718
In this study, we investigate the effect of the inclusion of nitrogen in amorphous carbon thin films deposited by pulsed laser deposition, which results in stress induced modifications to the band structure and the concomitant changes to the electronic transport properties. The microstructural changes due to nitrogen incorporation were examined using electron energy-loss spectroscopy and Raman scattering. The band structure was investigated using spectroscopic ellipsometry data in the range of. 1.5-5 eV, which was fitted to the Tauc Lorentz model parametrization and optical transmittance measurements. The dielectric constant evaluated using optical techniques was compared to that obtained with electrical measurements, assuming a Poole-Frenkel type conduction process based on the best fits to data. The electrical conduction mechanism is discussed for both low and high electric fields, in the context of the shape of the band density of states. By relating a wide range of measurement techniques, a detailed relationship between the microstructure, and the optical and the electrical structures of a-CNx films is obtained. From these measurements, it was found that, primarily, the change in density of the film, with increasing nitrogen pressure, affects the band structure of the amorphous carbon nitride. This is due to the fact that the density affects the stress in the film, which also impacts the localized states in the band gap. These results are supported by density of states measurements using scanning tunneling spectroscopy.
Copyright 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
The following article appeared in Journal of Applied Physics, 104 (6) 063701 and may be found at Y. Miyajima et al., J. Appl. Phys. 104, 063701 (2008)
|Uncontrolled Keywords:||Science & Technology, Physical Sciences, Physics, Applied, Physics, DIAMOND-LIKE CARBON, ENERGY-LOSS SPECTROSCOPY, NITRIDE FILMS, THIN-FILMS, FIELD-EMISSION, ELECTROCHEMICAL REACTIVITY, CONDUCTION MECHANISM, RAMAN-SPECTRA, ION ENERGY, RESONANCE|
|Divisions:||Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre|
|Deposited By:||Mr Adam Field|
|Deposited On:||20 Nov 2012 10:32|
|Last Modified:||27 Apr 2013 14:35|
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