Characterisation of electron-beam deposited tungsten interconnects
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Kerr, GL, Cox, DC, Stolojan, V, Silva, SRP, Baker, RT, Mobus, G and Brown, PD (2008) Characterisation of electron-beam deposited tungsten interconnects In: Electron Microscopy and Analysis Group Conference, 2007-09-03 - 2007-09-07, Glasgow Caledonian Univ, Glasgow, SCOTLAND.
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Official URL: http://dx.doi.org/10.1088/1742-6596/126/1/012073
Item Type: | Conference or Workshop Item (Conference Paper) | ||||||||||||||||||||||||
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Divisions : | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre | ||||||||||||||||||||||||
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Date : | 1 January 2008 | ||||||||||||||||||||||||
DOI : | 10.1088/1742-6596/126/1/012073 | ||||||||||||||||||||||||
Contributors : |
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Uncontrolled Keywords : | Science & Technology, Technology, Physical Sciences, Nanoscience & Nanotechnology, Materials Science, Multidisciplinary, Physics, Applied, Science & Technology - Other Topics, Materials Science, Physics, PLATINUM, GROWTH | ||||||||||||||||||||||||
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Additional Information : | Copyright 2008 Institute of Physics. This is the author's accepted manuscript. | ||||||||||||||||||||||||
Depositing User : | Symplectic Elements | ||||||||||||||||||||||||
Date Deposited : | 13 Dec 2012 16:44 | ||||||||||||||||||||||||
Last Modified : | 31 Oct 2017 14:48 | ||||||||||||||||||||||||
URI: | http://epubs.surrey.ac.uk/id/eprint/732874 |
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