Characterisation of electron-beam deposited tungsten interconnects

Kerr, GL, Cox, DC, Stolojan, V, Silva, SRP, Baker, RT, Mobus, G and Brown, PD (2008) Characterisation of electron-beam deposited tungsten interconnects In: Electron Microscopy and Analysis Group Conference, 2007-09-03 - 2007-09-07, Glasgow Caledonian Univ, Glasgow, SCOTLAND.

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Item Type:	Conference or Workshop Item (Conference Paper)
Divisions :	Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :	Name Email ORCID Kerr, GL Cox, DC Stolojan, V Silva, SRP Baker, RT Mobus, G Brown, PD
Date :	1 January 2008
DOI :	10.1088/1742-6596/126/1/012073
Contributors :	Contribution Name Email ORCID http://www.loc.gov/loc.terms/relators/PBL IOP PUBLISHING LTD,
Uncontrolled Keywords :	Science & Technology, Technology, Physical Sciences, Nanoscience & Nanotechnology, Materials Science, Multidisciplinary, Physics, Applied, Science & Technology - Other Topics, Materials Science, Physics, PLATINUM, GROWTH
Related URLs :	Author
Additional Information :	Copyright 2008 Institute of Physics. This is the author's accepted manuscript.
Depositing User :	Symplectic Elements
Date Deposited :	13 Dec 2012 16:44
Last Modified :	31 Oct 2017 14:48
URI:	http://epubs.surrey.ac.uk/id/eprint/732874

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