Characterisation of electron-beam deposited tungsten interconnects
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Kerr, L, Cox, C, Stolojan, V and Silva, P (2008) Characterisation of electron-beam deposited tungsten interconnects Journal of Physics: Conference Series, 126 (1). ISSN 1742-6596
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Official URL: http://dx.doi.org/10.1088/1742-6596/126/1/012073
| Item Type: | Article |
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| Additional Information: | Copyright 2008 Institute of Physics. This is the author's accepted manuscript. |
| Divisions: | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre |
| ID Code: | 732873 |
| Deposited By: | Symplectic Elements |
| Deposited On: | 16 Nov 2012 10:27 |
| Last Modified: | 16 Feb 2013 15:42 |
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