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Characterisation of electron-beam deposited tungsten interconnects

Kerr, L, Cox, C, Stolojan, V and Silva, P (2008) Characterisation of electron-beam deposited tungsten interconnects Journal of Physics: Conference Series, 126 (1). ISSN 1742-6596

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Item Type: Article
Additional Information: Copyright 2008 Institute of Physics. This is the author's accepted manuscript.
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Symplectic Elements
Date Deposited: 16 Nov 2012 10:27
Last Modified: 23 Sep 2013 19:46
URI: http://epubs.surrey.ac.uk/id/eprint/732873

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