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Approaches to analyzing insulators with Auger electron spectroscopy: Update and overview

Baer, DR, Lea, AS, Geller, JD, Hammond, JS, Kover, L, Powell, CJ, Seah, MP, Suzuki, M, Watts, JF and Wolstenholme, J (2010) Approaches to analyzing insulators with Auger electron spectroscopy: Update and overview JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 176 (1-3). 80 - 94. ISSN 0368-2048

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Abstract

This paper provides an updated overview, intended to be of practical value to analysts, of methods that can be applied to minimize or control the build-up of near-surface electrical charge during electron-induced Auger electron spectroscopy (AES). Although well-developed methods can be highly effective, dealing with insulating or ungrounded samples for which high spatial resolution is needed remains a challenge. Examples of the application of methods involving low-energy ion sources and sample thinning using a focused ion beam that can allow high-resolution measurements on a variety of samples are highlighted. The physical bases of newer and traditional methods are simply described along with strengths and limitations of the methods. Summary tables indicate methods that can be applied to most AES spectrometers, methods that require special instrumental capabilities and methods that require special sample preparation or mounting.

Item Type: Article
Additional Information: NOTICE: this is the author’s version of a work that was accepted for publication in Journal of Electron Spectroscopy and Related Phenomena. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Journal of Electron Spectroscopy and Related Phenomena, 176(1-3), January 2010, DOI 10.1016/j.elspec.2009.03.021
Uncontrolled Keywords: Science & Technology, Technology, Spectroscopy, Auger electron spectroscopy, Surface charging, Surface analysis, Practical guide, SURFACE-ANALYSIS, STRUCTURE CERAMICS, SAM MICROANALYSIS, AES, CHARGE, MICROSCOPY, BACKSIDE, GLASS, MECHANISMS, REDUCTION
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Divisions: Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Depositing User: Symplectic Elements
Date Deposited: 11 Jul 2012 16:45
Last Modified: 23 Sep 2013 19:33
URI: http://epubs.surrey.ac.uk/id/eprint/712199

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