University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Freestanding waveguides in silicon

Yang, PY, Mashanovich, GZ, Gomez-Morilla, I, Headley, WR, Reed, GT, Teo, EJ, Blackwood, DJ, Breese, MBH and Bettiol, AA (2007) Freestanding waveguides in silicon Applied Physics Letters, 90 (24). ISSN 0003-6951

YANG Free standing waveguides in silicon 2007.pdf - Published Version
Available under License : See the attached licence file.

Download (253kB)
[img] Plain Text (licence)

Download (1kB)


Using a direct-write process for the production of three dimensional microstructures on a semiconductor, freestanding waveguides have been realized in silicon. The waveguides are produced by a focused beam of high energy protons that is scanned over a silicon substrate. The latent image of the scan is subsequently developed by electrochemical etching. Herein the authors report on the fabrication method as well as determining the propagation loss of these structures. Propagation loss values of 13.4 and 14.6 dB/cm were obtained for these preliminary structures for transverse electric and transverse magnetic polarizations, respectively.

Item Type: Article
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Photonics
Depositing User: Mr Adam Field
Date Deposited: 14 Sep 2011 11:12
Last Modified: 09 Jun 2014 13:45

Actions (login required)

View Item View Item


Downloads per month over past year

Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800