Laser erasable implanted gratings for integrated silicon photonics
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Loiacono, R, Reed, GT, Mashanovich, GZ, Gwilliam, R, Henley, SJ, Hu, YF, Feldesh, R and Jones, R (2011) Laser erasable implanted gratings for integrated silicon photonics Optics Express, 19 (11). 10728 - 10734. ISSN 1094-4087
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Official URL: http://dx.doi.org/10.1364/OE.19.010728
Abstract
In this work we experimentally demonstrate laser erasable germanium implanted Bragg gratings in SOI. Bragg gratings are formed in a silicon waveguide by ion implantation induced amorphization, and are subsequently erased by a contained laser thermal treatment process. An extinction ratio up to 24dB has been demonstrated in transmission for the fabricated implanted Bragg gratings with lengths up to 1000 mu m. Results are also presented, demonstrating that the gratings can be selectively removed by UV pulsed laser annealing, enabling a new concept of laser erasable devices for integrated photonics. (C) 2011 Optical Society of America
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | AMORPHOUS-SILICON, WAVE-GUIDES, FABRICATION |
| Divisions: | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Photonics |
| ID Code: | 7086 |
| Deposited By: | Symplectic Elements |
| Deposited On: | 14 Sep 2011 11:07 |
| Last Modified: | 01 Apr 2013 14:49 |
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