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Targeting mass-selected cluster ions for the deposition of advanced carbonaceous materials using an inductively coupled plasma

Zeze, DA, Silva, SRP, Brown, NMD, Joyce, AM and Anderson, CA (2002) Targeting mass-selected cluster ions for the deposition of advanced carbonaceous materials using an inductively coupled plasma JOURNAL OF APPLIED PHYSICS, 91 (4). 1819 - 1827. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, AMORPHOUS-CARBON, BEAM DEPOSITION, NITRIDE FILMS, OVERCOATS, GROWTH
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Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Melanie Hughes
Date Deposited: 21 Oct 2010 09:27
Last Modified: 09 Jun 2014 13:25
URI: http://epubs.surrey.ac.uk/id/eprint/2536

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