University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Targeting mass-selected cluster ions for the deposition of advanced carbonaceous materials using an inductively coupled plasma

Zeze, DA, Silva, SRP, Brown, NMD, Joyce, AM and Anderson, CA (2002) Targeting mass-selected cluster ions for the deposition of advanced carbonaceous materials using an inductively coupled plasma JOURNAL OF APPLIED PHYSICS, 91 (4). 1819 - 1827. ISSN 0021-8979

[img]
Preview
PDF
targeting_mass-selected_SILVA_02.pdf - Published Version

Download (341kB)
Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :
AuthorsEmail
Zeze, DAUNSPECIFIED
Silva, SRPUNSPECIFIED
Brown, NMDUNSPECIFIED
Joyce, AMUNSPECIFIED
Anderson, CAUNSPECIFIED
Date : 15 February 2002
Identification Number : 10.1063/1.1435417
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, AMORPHOUS-CARBON, BEAM DEPOSITION, NITRIDE FILMS, OVERCOATS, GROWTH
Related URLs :
Depositing User : Melanie Hughes
Date Deposited : 21 Oct 2010 09:27
Last Modified : 17 Jan 2015 14:51
URI: http://epubs.surrey.ac.uk/id/eprint/2536

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800