Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films
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Chhowalla, M, Robertson, J, Chen, CW, Silva, SRP, Davis, CA, Amaratunga, GAJ and Milne, WI (1997) Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films JOURNAL OF APPLIED PHYSICS, 81 (1). pp. 139-145.
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Official URL: http://jap.aip.org/resource/1/japiau/v81/i1/p139_s...
| Item Type: | Article | ||||||||||||||||||||||||
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| Divisions : | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre | ||||||||||||||||||||||||
| Authors : |
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| Date : | 1 January 1997 | ||||||||||||||||||||||||
| DOI : | 10.1063/1.364000 | ||||||||||||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, A-C, SUBPLANTATION MODEL, COMPRESSIVE-STRESS, MOLECULAR-DYNAMICS, DEPOSITION, SILICON, GROWTH, ARC, IMPLANTATION | ||||||||||||||||||||||||
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| Depositing User : | Melanie Hughes | ||||||||||||||||||||||||
| Date Deposited : | 08 Oct 2010 15:35 | ||||||||||||||||||||||||
| Last Modified : | 31 Oct 2017 14:05 | ||||||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/2442 |
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