Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films

Chhowalla, M, Robertson, J, Chen, CW, Silva, SRP, Davis, CA, Amaratunga, GAJ and Milne, WI (1997) Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films JOURNAL OF APPLIED PHYSICS, 81 (1). pp. 139-145.

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Item Type:	Article
Divisions :	Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :	Authors Email ORCID Chhowalla, M UNSPECIFIED UNSPECIFIED Robertson, J UNSPECIFIED UNSPECIFIED Chen, CW UNSPECIFIED UNSPECIFIED Silva, SRP UNSPECIFIED UNSPECIFIED Davis, CA UNSPECIFIED UNSPECIFIED Amaratunga, GAJ UNSPECIFIED UNSPECIFIED Milne, WI UNSPECIFIED UNSPECIFIED
Date :	1 January 1997
Identification Number :	10.1063/1.364000
Uncontrolled Keywords :	Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, A-C, SUBPLANTATION MODEL, COMPRESSIVE-STRESS, MOLECULAR-DYNAMICS, DEPOSITION, SILICON, GROWTH, ARC, IMPLANTATION
Related URLs :	Author
Depositing User :	Melanie Hughes
Date Deposited :	08 Oct 2010 15:35
Last Modified :	17 Jan 2015 14:40
URI:	http://epubs.surrey.ac.uk/id/eprint/2442

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