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Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films

Chhowalla, M, Robertson, J, Chen, CW, Silva, SRP, Davis, CA, Amaratunga, GAJ and Milne, WI (1997) Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films JOURNAL OF APPLIED PHYSICS, 81 (1). 139 - 145. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, A-C, SUBPLANTATION MODEL, COMPRESSIVE-STRESS, MOLECULAR-DYNAMICS, DEPOSITION, SILICON, GROWTH, ARC, IMPLANTATION
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Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Melanie Hughes
Date Deposited: 08 Oct 2010 15:35
Last Modified: 09 Jun 2014 13:25
URI: http://epubs.surrey.ac.uk/id/eprint/2442

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