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Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating

Schwan, J, Ulrich, S, Roth, H, Ehrhardt, H, Silva, SRP, Robertson, J, Samlenski, R and Brenn, R (1996) Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating JOURNAL OF APPLIED PHYSICS, 79 (3). 1416 - 1422. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, RAMAN-SCATTERING, DEPOSITION, ENERGY, PRESSURE, GROWTH
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Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Melanie Hughes
Date Deposited: 29 Sep 2010 09:18
Last Modified: 09 Jun 2014 13:25
URI: http://epubs.surrey.ac.uk/id/eprint/2373

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