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Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing

Pharr, GM, Callahan, DL, McAdams, SD, Tsui, TY, Anders, S, Anders, A, Ager, JW, Brown, IG, Bhatia, CS, Silva, SRP and Robertson, J (1996) Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing APPLIED PHYSICS LETTERS, 68 (6). 779 - 781. ISSN 0003-6951

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Item Type: Article
Uncontrolled Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, AMORPHOUS-CARBON
Related URLs:
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Melanie Hughes
Date Deposited: 29 Sep 2010 09:00
Last Modified: 09 Jun 2014 13:41
URI: http://epubs.surrey.ac.uk/id/eprint/2372

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