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Nanocrystallites in Tetrahedral Amorphous Carbon Films

Silva, S Ravi P, Xu, Shi, Tay, B X, Tan, H S and Milne, W I (1996) Nanocrystallites in Tetrahedral Amorphous Carbon Films Applied Physics Letters, 69 (4). pp. 491-493. ISSN 0003-6951

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Abstract

The microstructure of filtered cathodic vacuum arc deposited tetrahedral amorphous carbon films is studied as a function of ion energy. An optimum energy window in the density and C–C sp3 content at an ion energy of ;90 eV observed in this study. It is shown that the density of the amorphous carbon films are closely related to the sp3 content. The observation of nanocrystals embedded in the amorphous carbon matrix is reported. Most of the crystals observed by transmission electron microscopy can be indexed to graphite, but some of the crystals can be indexed to cubic diamond. The chemical composition of the crystals is analyzed using electron energy loss spectroscopy ~EELS!. The only discernible EELS edge is that of C at an energy of 285 eV.

Item Type: Article
Additional Information: © 1996 American Institute of Physics
Related URLs:
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Melanie Hughes
Date Deposited: 29 Sep 2010 08:48
Last Modified: 23 Sep 2013 18:38
URI: http://epubs.surrey.ac.uk/id/eprint/2371

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