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Influence of precursor gases on the structure of plasma deposited amorphous hydrogenated carbon-nitrogen films

Franceschini, DF, Freire, FL and Silva, SRP (1996) Influence of precursor gases on the structure of plasma deposited amorphous hydrogenated carbon-nitrogen films APPLIED PHYSICS LETTERS, 68 (19). 2645 - 2647. ISSN 0003-6951

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Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :
AuthorsEmail
Franceschini, DFUNSPECIFIED
Freire, FLUNSPECIFIED
Silva, SRPUNSPECIFIED
Date : 6 May 1996
Identification Number : 10.1063/1.116268
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON
Related URLs :
Depositing User : Melanie Hughes
Date Deposited : 29 Sep 2010 08:38
Last Modified : 17 Jan 2015 14:56
URI: http://epubs.surrey.ac.uk/id/eprint/2370

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