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INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA

AMARATUNGA, GAJ, SILVA, SRP and MCKENZIE, DR (1991) INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA JOURNAL OF APPLIED PHYSICS, 70 (10). 5374 - 5379. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, SPECTROSCOPY
Related URLs:
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Depositing User: Melanie Hughes
Date Deposited: 24 Sep 2010 12:32
Last Modified: 09 Jun 2014 13:25
URI: http://epubs.surrey.ac.uk/id/eprint/2361

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