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INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA

AMARATUNGA, GAJ, SILVA, SRP and MCKENZIE, DR (1991) INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA JOURNAL OF APPLIED PHYSICS, 70 (10). 5374 - 5379. ISSN 0021-8979

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Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :
AuthorsEmail
AMARATUNGA, GAJUNSPECIFIED
SILVA, SRPUNSPECIFIED
MCKENZIE, DRUNSPECIFIED
Date : 15 November 1991
Identification Number : 10.1063/1.350219
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, SPECTROSCOPY
Related URLs :
Depositing User : Melanie Hughes
Date Deposited : 24 Sep 2010 12:32
Last Modified : 17 Jan 2015 14:54
URI: http://epubs.surrey.ac.uk/id/eprint/2361

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