High quality YBa2Cu3O7-delta Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage
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Peng, NH, Kang, DJ, Jeynes, C, Webb, RP, Moore, DF, Blamire, MG and Chakarov, IR (2003) High quality YBa2Cu3O7-delta Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage In: Applied Superconductivity Conference, 2002-08-04 - 2002-08-09, HOUSTON, TEXAS.
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Abstract
High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Uncontrolled Keywords: | Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Physics, Applied, Engineering, Physics, ion irradiation damage, Josephson junction, MID, Monte Carlo simulation, YBCO, MONTE-CARLO SIMULATIONS, THIN-FILMS, ION-BEAM, IMPLANTATION, TRANSPORT |
| Divisions: | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre |
| ID Code: | 1267 |
| Deposited By: | Mr Adam Field |
| Deposited On: | 27 May 2010 15:39 |
| Last Modified: | 08 Jun 2013 16:13 |
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