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Infrared reflection spectroscopy analysis of SIMOX material obtained by multiple implant

Perez, A., Samitier, J., Cornet, A., Morante, J. R., Hemment, P. L. F. and Homewood, K. P. (1990) Infrared reflection spectroscopy analysis of SIMOX material obtained by multiple implant IEEE 1990 SOS/SOI Technology Conference. pp. 63-64.

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Abstract

An analysis was carried out of SOI/SIMOX structures obtained by sequential implantation and annealing (SIA). The analysis of these structures has been made in relation to those obtained by an equivalent standard single implant and anneal (SS structures), by means of infrared reflection spectroscopy. The use of a fast Fourier transform infrared (FTIR) system allows the combination of a low measuring time of the spectra (on the order of several minutes) with a high spectral resolution (up to 0.02 cm-1). Complementary optical measurements such as photoluminescence and Raman spectroscopy using different excitation powers and wavelengths reveal the higher quality of the surface region of the top silicon layer free of precipitates in the SIA material. These data, together with the FTIR results, show the potential of the SIA technique for obtaining high quality quasi-ideal SOI structures.

Item Type: Article
Additional Information: Perez, A., Samitier, J., Cornet, A., Morante, J.R., Hemment, P.L.F., & Homewood, K.P. (1990). Infrared reflection spectroscopy analysis of SIMOX material obtained by multiple implant. IEEE 1990 SOS/SOI Technology Conference, (2-4 Oct. 1990), pp. 63 - 64. © 1990 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre
Depositing User: Mr Adam Field
Date Deposited: 27 May 2010 14:39
Last Modified: 23 Sep 2013 18:32
URI: http://epubs.surrey.ac.uk/id/eprint/1260

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