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Understanding, modeling and optimizing vacancy engineering for stable highly boron-doped ultrashallow junctions

Cowern, NEB, Smith, AJ, Colombeau, B, Gwilliam, R, Sealy, BJ and Collart, EJH (2005) Understanding, modeling and optimizing vacancy engineering for stable highly boron-doped ultrashallow junctions In: IEEE International Electron Devices Meeting, 2005-12-05 - 2005-12-07, Washington, DC.

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Abstract

This work presents breakthrough results on the physics, modeling and application of ion-implanted vacancies for high-performance B-doped ultrashallow junctions. We demonstrate for the first time electrically active B concentrations approaching 10(21)/cm(3), achieved by low-temperature annealing, without preamorphisation. Source/drain (S/D) junctions formed by advanced vacancy engineering implants (VEI) are activated far above solubility, are stable with respect to deactivation, and are practically diffusion less. Furthermore sheet resistance R, is predicted to stay almost constant with decreasing junction depth X-j, outperforming other S/D engineering approaches beyond the 45 nm node.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: Science & Technology, Technology, Computer Science, Hardware & Architecture, Engineering, Electrical & Electronic, Computer Science, Engineering, SILICON, SI
Related URLs:
Divisions: Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre
Depositing User: Mr Adam Field
Date Deposited: 27 May 2010 14:38
Last Modified: 23 Sep 2013 18:31
URI: http://epubs.surrey.ac.uk/id/eprint/1218

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