University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation

Jeynes, C, Webb, RP and Lohstroh, A (2011) Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation Reviews of Accelerator Science and Technology, 4. pp. 41-82.

[img] Text
3rdJan2012.pdf
Restricted to Repository staff only
Available under License : See the attached licence file.

Download (6MB)
[img] Text (licence)
SRI_deposit_agreement.pdf
Restricted to Repository staff only

Download (33kB)

Abstract

Analysis using MeV ion beams is a thin film characterisation technique invented some 50 years ago which has recently had the benefit of a number of important advances. This review will cover damage profiling in crystals including studies of defects in semiconductors, surface studies, and depth profiling with sputtering. But it will concentrate on thin film depth profiling using Rutherford backscattering, particle induced X-ray emission and related techniques in the deliberately synergistic way that has only recently become possible. In this review of these new developments, we will show how this integrated approach, which we might call “total IBA”, has given the technique great analytical power.

Item Type: Article
Authors :
NameEmailORCID
Jeynes, CUNSPECIFIEDUNSPECIFIED
Webb, RPUNSPECIFIEDUNSPECIFIED
Lohstroh, AUNSPECIFIEDUNSPECIFIED
Date : 15 December 2011
Identification Number : 10.1142/S1793626811000483
Uncontrolled Keywords : RBS, EBS, PIXE, ERD, NRA, MEIS, LEIS, SIMS, IBIC
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 28 Mar 2017 15:01
Last Modified : 31 Oct 2017 14:19
URI: http://epubs.surrey.ac.uk/id/eprint/121076

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800